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Dust sensor is used in semiconductor integrated circuit production clean room

Update: 2020-06-29 11:52 Source: LUFTMY

For many production plants, there are strict requirements for workshop environment and cleanliness. For example, semiconductor integrated circuit production needs to be carried out in a super clean environment, and different manufacturing processes have different requirements for workshop cleanliness.In order to reflect the cleanliness of the workshop more intuitively and accurately, dust sensor is indispensable.

Dust sensor is used in semiconductor integrated circuit production clean room

Semiconductor integrated circuits are exposed to many pollutants in the production process, such as inorganic ions, organic substances, microorganisms, gaseous impurities and so on.In addition, in a broad sense, inappropriate temperature, humidity, light, electrostatic excess, electromagnetic noise, air noise and micro-vibration are also special pollutants.Among them, when the content of particle impurities, inorganic ions, organic substances, microorganisms and gas impurities exceeds a certain limit, the integrated circuit products will appear surface scratches, graphic fracture, short circuit, pinhole, peeling and other phenomena.Lead to circuit leakage and abnormal electrical characteristics, affect circuit performance and service life, or lead to circuit scrap.In general, the failure rate of circuit products due to pollution can be as high as 60%.

In short, the yield of an IC chip is related to the defect density of the chip, which is related to the number of particles in the air.Therefore, with the rapid development of integrated circuits, not only the control of the size of particles in the air, but also the control of the number of particles is very high.At the same time, there are also relevant requirements for chemical pollution control of the dust-free workshop project in the VLSI production environment.

In view of this situation, dust sensors are needed to monitor the environment in semiconductor IC production workshops to ensure that the production environment meets the standards of cleanliness.

LD16 Laser PM2.5 Dust Sensor Model

LD16 laser dust sensor

Product features

◆ Laser MIE spherical scattering principle combined with lovelace space measurement patent to achieve accurate measurement

◆ Zero error alarm rate

◆ Real-time response and support continuous acquisition

◆ Minimum resolution particle size 0.1μm

◆ The service life of electronic control devices is ≥8 years, and the average working time without failure is ≥5 years

◆ The six-sided omni-directional shielding combined with software anti-jamming algorithm has stronger anti-jamming performance

◆ Wide range of applications, no need for duct design, compatible with multi-protocol output

TAGdust sensor production of clean room